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SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Rapidly removing grinding damage layer on fused silica by inductively coupled plasma processing
Jiang, Wenhan, Yang, Li, Riemer, Oltmann, Li, Shengyi, Wan, Yongjian, Chen, Heng, Zhou, Lin, Xie, Xuhui, Shi, Baolu, Xiong, HaobinVolume:
9683
Year:
2016
Language:
english
DOI:
10.1117/12.2244602
File:
PDF, 602 KB
english, 2016