Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires
Rouhi, J., Eswar, Kevin Alvin, Husairi, F.S., Alrokayan, Salman A.H., Khan, Haseeb A., Rusop, M.Volume:
1109
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.1109.500
Date:
June, 2015
File:
PDF, 263 KB
english, 2015