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A Simple Model for Ion Flux-Energy Distribution Functions in Capacitively Coupled Radio-Frequency Plasmas Driven by Arbitrary Voltage Waveforms
Schüngel, Edmund, Donkó, Zoltán, Schulze, JulianLanguage:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201600117
Date:
October, 2016
File:
PDF, 1.93 MB
english, 2016