![](/img/cover-not-exists.png)
Activation energy of thermal desorption of silicon oxide layers on silicon substrates
Enta, Yoshiharu, Osanai, Shodai, Ogasawara, TakahitoVolume:
656
Language:
english
Journal:
Surface Science
DOI:
10.1016/j.susc.2016.10.007
Date:
February, 2017
File:
PDF, 628 KB
english, 2017