MEMS-based platinum–platinum rhodium film temperature sensor on alumina substrate
Zhang, Congchun, Cheng, Ping, Wang, Qiang, Shao, Jing, Zhang, Jiubin, Duan, Li, Ding, GuifuVolume:
1
Language:
english
Journal:
The Journal of Engineering
DOI:
10.1049/joe.2016.0022
Date:
February, 2009
File:
PDF, 338 KB
english, 2009