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Preliminary study on atmospheric-pressure plasma-based...

Preliminary study on atmospheric-pressure plasma-based chemical dry figuring and finishing of reaction-sintered silicon carbide

Shen, Xinmin, Deng, Hui, Zhang, Xiaonan, Peng, Kang, Yamamura, Kazuya
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Volume:
55
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.55.10.105102
Date:
October, 2016
File:
PDF, 6.46 MB
english, 2016
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