Preliminary study on atmospheric-pressure plasma-based chemical dry figuring and finishing of reaction-sintered silicon carbide
Shen, Xinmin, Deng, Hui, Zhang, Xiaonan, Peng, Kang, Yamamura, KazuyaVolume:
55
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.55.10.105102
Date:
October, 2016
File:
PDF, 6.46 MB
english, 2016