Study on ductile mode machining of single crystal silicon...

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International Journal of Machine Tools and Manufacture 2016 / 11

Study on ductile mode machining of single crystal silicon by mechanical machining

Choi, Dae-Hee, Lee, Je-Ryung, Kang, Na-Ri, Je, Tae-Jin, Kim, Ju-Young, Jeon, Eun-chae
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Language:
english
Journal:
International Journal of Machine Tools and Manufacture
DOI:
10.1016/j.ijmachtools.2016.10.006
Date:
November, 2016
File:
PDF, 1.03 MB
english, 2016
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