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[IEEE 2016 29th Symposium on Integrated Circuits and Systems Design (SBCCI) - Belo Horizonte, Brazil (2016.8.29-2016.9.3)] 2016 29th Symposium on Integrated Circuits and Systems Design (SBCCI) - Development process for MEMS pressure sensors for standarized CMOS read-out circuitry
Schreiber-Prillwitz, Wolfgang, Job, ReinhartYear:
2016
Language:
english
DOI:
10.1109/SBCCI.2016.7724037
File:
PDF, 394 KB
english, 2016