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Plasma-Induced Interfacial Layer Impacts on TFETs With Poly-Si Channel Film by Oxygen Plasma Surface Treatment
Ma, William Cheng-Yu, Chang, Kang, Lin, Yu-Cheng, Wu, Tai-HsuanYear:
2016
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2016.2621056
File:
PDF, 1.60 MB
english, 2016