Deposition of silicon nitride coatings

Powder Metallurgy and Metal Ceramics 1984 / 04 Vol. 23; Iss. 4

Deposition of silicon nitride coatings

V. S. Panov, O. B. Sekridova
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Volume:
23
Language:
english
Pages:
4
DOI:
10.1007/bf00796391
Date:
April, 1984
File:
PDF, 388 KB
english, 1984
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