Effect of dimensional laser machining on the structure and properties of silicon nitride
A. V. Lavrinovich, Ya. A. Kryl', I. M. Androsov, S. A. ArtemyukVolume:
29
Language:
english
Pages:
5
DOI:
10.1007/bf00797239
Date:
April, 1990
File:
PDF, 844 KB
english, 1990