![](/img/cover-not-exists.png)
The Investigation of Sputtered Amorphous Silicon Films for MEMS and NEMS Applications
Du, Bo, Ma, Jinyi, Jiao, Xiangquan, Zhang, Rui, Zhong, Hui, Shi, YuVolume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.12781
Date:
August, 2016
File:
PDF, 373 KB
english, 2016