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Non-Destructive Imaging of Organosilicate Glass (OSG) Thin Films at Low Voltage with the EsB Detector
Garitagoitia Cid, Aranzazu, Moayedi, Elham, Pakbaz, Hash, Rosenberg, Robert, Clausner, Andre, Zschech, EhrenfriedYear:
2016
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/TDMR.2016.2628166
File:
PDF, 559 KB
english, 2016