IPMC Actuators Fabricated Using MEMS Technology
Tsuchitani, Shigeki, Kikuchi, Kunitomo, Shimizu, Ippei, Taniguchi, Tomohisa, Miki, HirofumiVolume:
97
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/AST.97.57
Date:
October, 2016
File:
PDF, 2.83 MB
english, 2016