Multiscale patterning of a metallic glass using sacrificial...

Microsystems & Nanoengineering 2015 / 12 Vol. 1

Multiscale patterning of a metallic glass using sacrificial imprint lithography

Singer, Jonathan P., Pelligra, Candice I., Kornblum, Noga, Choo, Youngwoo, Gopinadhan, Manesh, Bordeenithikasem, Punnathat, Ketkaew, Jittisa, Fatt Liew, Seng, Cao, Hui, Schroers, Jan, Osuji, Chinedum
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Volume:
1
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/micronano.2015.40
Date:
December, 2015
File:
PDF, 1.74 MB
english, 2015
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