[IEEE 2016 31st Symposium on Microelectronics Technology and Devices (SBMicro) - Belo Horizonte, Brazil (2016.8.29-2016.9.3)] 2016 31st Symposium on Microelectronics Technology and Devices (SBMicro) - Simulation and fabrication of silicon nitride microring resonator by DUV lithography

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