[IEEE 2016 IEEE International Ultrasonics Symposium (IUS) - Tours, France (2016.9.18-2016.9.21)] 2016 IEEE International Ultrasonics Symposium (IUS) - Fabrication of capacitive micromachined ultrasonic transducers using a boron etch-stop method
Diederichsen, Soren Elmin, Sandborg-Olsen, Filip, Engholm, Mathias, Lei, Anders, Jenseny, Jorgen Arendt, Thomsen, Erik VilainYear:
2016
Language:
english
DOI:
10.1109/ULTSYM.2016.7728763
File:
PDF, 1.30 MB
english, 2016