Nanomanufacturing: high-throughput, cost-effective deposition of atomic scale thin films via atmospheric pressure spatial atomic layer deposition
Musselman, Kevin P, Uzoma, Chukwuka F., Miller, Michael S.Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b03077
Date:
November, 2016
File:
PDF, 839 KB
english, 2016