[IEEE 2016 IEEE International Ultrasonics Symposium (IUS) - Tours, France (2016.9.18-2016.9.21)] 2016 IEEE International Ultrasonics Symposium (IUS) - AlN film stress and uniformity for BAW filters on 200mm wafers
Mishin, Sergey, Oshmyansky, YuryYear:
2016
Language:
english
DOI:
10.1109/ULTSYM.2016.7728377
File:
PDF, 2.74 MB
english, 2016