Design method and algorithms for directed self-assembly...

Journal of Micro/Nanolithography MEMS and MOEMS 2016 / 11 Vol. 15; Iss. 4

Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits

Karageorgos, Ioannis, Ryckaert, Julien, Gronheid, Roel, Tung, Maryann C., Wong, H.-S. Philip, Karageorgos, Evangelos, Croes, Kris, Bekaert, Joost, Vandenberghe, Geert, Stucchi, Michele, Dehaene, Wim
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Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.4.043506
Date:
November, 2016
File:
PDF, 1.33 MB
english, 2016
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