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Microelectronics to Nanoelectronics (Materials, Devices & Manufacturability) || Silicon Etching and Etch Techniques for NEMs and MEMs
Kaul, AnupamaVolume:
10.1201/b1
Year:
2012
Language:
english
DOI:
10.1201/b12722-7
File:
PDF, 1.42 MB
english, 2012