Dielectrics stability for intermediate BEOL in 3D...

Microelectronic Engineering 2016 / 11

Dielectrics stability for intermediate BEOL in 3D sequential integration

Deprat, Fabien, Fenouillet-Beranger, Claire, Jousseaume, Vincent, Guerin, Chloé, Beugin, Virginie, Rochat, Névine, Licitra, Christophe, Caubet-Hilloutou, Véronique, Benoit, Daniel, Imbert, Gregory, Ra
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.11.006
Date:
November, 2016
File:
PDF, 964 KB
english, 2016
Conversion to is in progress
Conversion to is failed