In-depth TEM characterization of block copolymer pattern...

Nanotechnology 2016 / 12 Vol. 27; Iss. 48

In-depth TEM characterization of block copolymer pattern transfer at germanium surfaces

Cummins, Cian, Collins, Timothy W, Kelly, Roisin A, McCarthy, Eoin K, Morris, Michael A
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/48/484003
Date:
December, 2016
File:
PDF, 3.18 MB
english, 2016
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