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SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials - High precision locating control system based on VCM for Talbot lithography
Luo, Xiangang, Ye, Tianchun, Xin, Tingwen, Hu, Song, Hong, Minghui, Gu, Min, Yao, Jingwei, Zhao, Lixin, Deng, Qian, Hu, SongVolume:
9685
Year:
2016
Language:
english
DOI:
10.1117/12.2243616
File:
PDF, 502 KB
english, 2016