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SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials - Design and simulation of large field plate lithography lens
Luo, Xiangang, Ye, Tianchun, Xin, Tingwen, Hu, Song, Hong, Minghui, Gu, Min, Deng, Chao, Xing, Tingwen, Lin, Wumei, Zhu, XianchangVolume:
9685
Year:
2016
Language:
english
DOI:
10.1117/12.2245717
File:
PDF, 317 KB
english, 2016