SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Fabrication of ultrathin silicon PIN detector
Yu, Min, Wang, Yuelin, Xie, Huikai, Dong, Xianshan, Li, Ying, Jin, Yufeng, Tian, Dayu, Wang, Jinyan, Jin, YufengVolume:
8191
Year:
2011
Language:
english
DOI:
10.1117/12.900555
File:
PDF, 318 KB
english, 2011