Deposition of Molybdenum Thin Films on Flexible Polymer Substrates by Radio Frequency Magnetron Sputtering
Zhang, Rui, Huo, Zhenxuan, Jiao, Xiangquan, Du, Bo, Zhong, Hui, Shi, YuVolume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.12782
Date:
August, 2016
File:
PDF, 382 KB
english, 2016