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Effect of Ar/(Ar+O2) ratio on the microstructures and dielectric properties of Zn2SnO4 thin films by RF magnetron sputtering
Chen, Yih-Chien, Shen, Yan-RuVolume:
27
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-016-5150-9
Date:
October, 2016
File:
PDF, 614 KB
english, 2016