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Chemistry of Materials 2016 / 11

Role of Initial Precursor Chemisorption on Incubation Delay for Molybdenum Oxide Atomic Layer Deposition

Nanayakkara, Charith E, Vega, Abraham, Liu, Guo, Dezelah, Charles L., Kanjolia, Ravindra K., Chabal, Yves J.
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Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b03423
Date:
November, 2016
File:
PDF, 1.93 MB
english, 2016
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