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Observation of surface contamination layer by X-ray reflectometry (XRR) analyses
Kim, Chang Soo, Jeon, Hyeon-Gu, Jung, Young, Choi, Minhyuk, O, Byungsung, Kim, Ki-HongYear:
2016
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.6188
File:
PDF, 505 KB
english, 2016