Morphological and electrical comparison of Ti and Ta based...

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Microelectronics Reliability 2016 / 11

Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs

Pooth, A., Bergsten, J., Rorsman, N., Hirshy, H., Perks, R., Tasker, P., Martin, T., Webster, R.F., Cherns, D., Uren, M.J., Kuball, M.
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Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2016.11.002
Date:
November, 2016
File:
PDF, 953 KB
english, 2016
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