Atomic layer deposition of ZnO:Al on PAA substrates

Journal of Physics Conference Series 2016 / 10 Vol. 764

Atomic layer deposition of ZnO:Al on PAA substrates

Blagoev, B S, Vlakhov, E, Videkov, V, Tzaneva, B, Łuka, G, Witkowski, B S, Terziyska, P, Leclercq, J, Krajewski, T A, Guziewicz, E, Dimitrov, D Z, Mehandzhiev, V B, Sveshtarov, P
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Volume:
764
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/764/1/012004
Date:
October, 2016
File:
PDF, 794 KB
english, 2016
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