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Amorphous Carbon Films on Glass Prepared by Hollow Cathodes at Moderate Pressure
Baránková, Hana, Bardos, Ladislav, Silins, KasparsVolume:
5
Year:
2016
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0311609jss
File:
PDF, 909 KB
english, 2016