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Impact of N2O/NH3/N2 Gas Mixture on the Interface Quality of Germanium MOS Capacitors
Dushaq, G., Rasras, M., Nayfeh, A.Volume:
75
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07508.0661ecst
Date:
September, 2016
File:
PDF, 353 KB
english, 2016