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[IEEE 2016 IEEE International Conference on Dielectrics (ICD) - Montpellier, France (2016.7.3-2016.7.7)] 2016 IEEE International Conference on Dielectrics (ICD) - High temperature dielectric properties of SiO2 films deposited by TEOS PECVD
Lumei Wei,, Locatelli, Marie-Laure, Diaham, Sombel, Pham, Cong Duc, Grosset, Gregory, Dupuy, LionelYear:
2016
Language:
english
DOI:
10.1109/icd.2016.7547801
File:
PDF, 343 KB
english, 2016