Effect of substrate type and temperature on the growth of...

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Effect of substrate type and temperature on the growth of thin Ru films by metal organic chemical vapor deposition

Chiba, Hirokazu, Hirano, Masaki, Kawano, Kazuhisa, Oshima, Noriaki, Funakubo, Hiroshi
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Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2016.11.032
Date:
November, 2016
File:
PDF, 826 KB
english, 2016
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