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Development of Miniature Camera Module Integrated With Solid Tunable Lens Driven by MEMS-Thermal Actuator
Zhang, Wei, Zou, Yongchao, Lin, Tong, Chau, Fook Siong, Zhou, GuangyaYear:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2602382
File:
PDF, 6.59 MB
english, 2016