Approach to Error Analysis and Reduction for...

Journal of the Physical Society of Japan 2012 / 12 Vol. 81; Iss. 12

Approach to Error Analysis and Reduction for Rotating-Polarizer-Analyzer Ellipsometer

Mao, Peng-Hui, Zheng, Yu-Xiang, Cai, Qing-Yuan, Zhang, Dong-Xu, Zhang, Rong-Jun, Zhao, Hai-Bin, Chen, Liang-Yao
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Volume:
81
Language:
english
Journal:
Journal of the Physical Society of Japan
DOI:
10.1143/JPSJ.81.124003
Date:
December, 2012
File:
PDF, 3.66 MB
english, 2012
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