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An ionization method of monitoring the relative thickness of the collector of planar transistor structures
E. R. Astvatsatur'yan, P. K. Skorobogatov, A. A. TomchukVolume:
27
Language:
english
Pages:
3
DOI:
10.1007/bf00838773
Date:
June, 1984
File:
PDF, 216 KB
english, 1984