![](/img/cover-not-exists.png)
Properties of Poly(alkyl 2-cyanoacrylate)s as Positive-Type Electron Beam Resists.
TAMURA, Akira, YONEZAWA, Masaji, SATO, Mitsuyoshi, OKUYAMA, ToshioVolume:
51
Year:
1994
Journal:
KOBUNSHI RONBUNSHU
DOI:
10.1295/koron.51.694
File:
PDF, 1.63 MB
1994