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Studies on the Decrease of Dissolution Rate in Unexposed Areas of Chemically Amplified Three-Component Positive Resist by Means of Dissolution Inhibitors. I. The Decrease of Dissolution Rate in Unexposed Areas of Chemically Amplified Three-Component Positive Resist by Means of tert-Butyl Carbonate as a Dissolution Inhibitor.
HORIBE, Hideo, KUMADA, Teruhiko, KUBOTA, ShigeruVolume:
53
Year:
1996
Journal:
KOBUNSHI RONBUNSHU
DOI:
10.1295/koron.53.133
File:
PDF, 1.67 MB
1996