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The Effect of Dissolution Inhibitors on the Dissolution Characteristics of a Chemically Amplified Three-Component Positive Resist.
HORIBE, Hideo, KUMADA, Teruhiko, KUBOTA, ShigeruVolume:
53
Year:
1996
Journal:
KOBUNSHI RONBUNSHU
DOI:
10.1295/koron.53.57
File:
PDF, 2.76 MB
1996