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Boron-doped amorphous carbon film grown by bias assisted pyrolysis chemical vapor deposition
Annuar, Ishak, Rouhi, Jalal, Rusop, MohamadVolume:
12
Year:
2015
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.11.20140937
File:
PDF, 3.17 MB
english, 2015