Reduction of plasma-induced fluorine damage to P-HEMTs...

IEICE Electronics Express 2005 Vol. 2; Iss. 5

Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emission

Uchiyama, Hiroyuki, Taniguchi, Takafumi, Kikawa, Takeshi
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Volume:
2
Year:
2005
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.2.143
File:
PDF, 332 KB
english, 2005
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