SAW characteristics of GaN layers with surfaces exposed by...

SAW characteristics of GaN layers with surfaces exposed by dry etching

Nishimura, Kazumi, Shigekawa, Naoteru, Yokoyama, Haruki, Hiroki, Masanobu, Hohkawa, Kohji
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Volume:
2
Year:
2005
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.2.501
File:
PDF, 443 KB
english, 2005
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