High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system
Ikehara, Tsuyoshi, Tsuchiya, ToshiyukiVolume:
4
Year:
2007
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.4.288
File:
PDF, 263 KB
english, 2007