Fabrication of tunneling dielectric thin-film transistor...

IEICE Electronics Express 2007 Vol. 4; Iss. 14

Fabrication of tunneling dielectric thin-film transistor with very thin SiNx films onto source and drain

Matsuo, Naoto, Fukushima, Atsushi, Ohkura, Kensaku, Heya, Akira, Yokoyama, Shin
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Volume:
4
Year:
2007
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.4.442
File:
PDF, 510 KB
english, 2007
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