Low contact resistivity of barrier height controlled PtHfSi...

IEICE Electronics Express 2011 Vol. 8; Iss. 20

Low contact resistivity of barrier height controlled PtHfSi to Si evaluated by cross-bridge Kelvin resistor

Ohmi, Shun-ichiro, Gao, Jun
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Volume:
8
Year:
2011
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.8.1710
File:
PDF, 490 KB
english, 2011
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