Nb 9-Layer Fabrication Process for Superconducting...

IEICE Transactions on Electronics 2014 Vol. E97.C; Iss. 3

Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation

NAGASAWA, Shuichi, HINODE, Kenji, SATOH, Tetsuro, HIDAKA, Mutsuo, AKAIKE, Hiroyuki, FUJIMAKI, Akira, YOSHIKAWA, Nobuyuki, TAKAGI, Kazuyoshi, TAKAGI, Naofumi
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Volume:
E97.C
Year:
2014
Language:
english
Journal:
IEICE Transactions on Electronics
DOI:
10.1587/transele.e97.c.132
File:
PDF, 5.33 MB
english, 2014
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