Origin of Trace Organic Contaminants Adsorbed on the Surface of Silicon Wafers in a Manufacturing Line.
PARK, Hyun-Mee, KIM, Young-Man, CHEONG, Chan Seong, RYU, Jae-Chun, LEE, Dai Woon, LEE, Kang-BongVolume:
18
Year:
2002
Language:
english
Journal:
Analytical Sciences
DOI:
10.2116/analsci.18.477
File:
PDF, 25 KB
english, 2002